Wardosanidze, Z. V. ., Nakhutsrishvili, I. . and Kokhreidze, R. . (2024) “Conditions of Formation of α- and β-Modifications of Ge3N4 and Preparation of Germanium Oxynitride Dielectric Films”, Journal of Coating Science and Technology, 11, pp. 1–5. doi: 10.6000/2369-3355.2024.11.01.