Z. V. . Wardosanidze, I. . Nakhutsrishvili, and R. . Kokhreidze, “Conditions of Formation of α- and β-Modifications of Ge3N4 and Preparation of Germanium Oxynitride Dielectric Films”, J. Coat. Sci. Technol., vol. 11, pp. 1–5, Sep. 2024.