Wardosanidze ZV, Nakhutsrishvili I, Kokhreidze R. Conditions of Formation of α- and β-Modifications of Ge3N4 and Preparation of Germanium Oxynitride Dielectric Films. J. Coat. Sci. Technol. [Internet]. 2024 Sep. 4 [cited 2024 Nov. 5];11:1-5. Available from: https://lifescienceglobal.com/pms/index.php/jcst/article/view/9760