JCST

Journal of Coating Science and Technology

Growth of Si-Doped Polycrystalline Diamond Films on AlN Substrates by Microwave Plasma Chemical Vapor Deposition
Pages 38-45
V.S. Sedov, A.A. Khomich, V.G. Ralchenko, A.K. Martyanov, S.S. Savin, O.N. Poklonskaya and N.S. Trofimov

DOI: http://dx.doi.org/10.6000/2369-3355.2015.02.02.1

Published: 14 September 2015

 

Abstract: Microcrystalline diamond films doped with silicon have been grown on aluminum nitride substrates by a microwave plasma CVD. The doping has been performed via adding silane in various concentrations to CH4–H2 reaction gas mixture in course of the deposition process. The films produced at the substrate temperatures of 750 to 950°C have been characterized by SEM, AFM, Raman and photoluminescence (PL) spectroscopy to assess the effect of Si doping on the diamond structure. The doped films showed bright photoluminescence of silicon-vacancy (SiV) color centers at 738 nm wavelength as well as noticeable side band at 723 nm. The optimum doping condition (SiH4/CH4 ≈ 0.6%), that maximize the SiV PL emission, was determined for the range of silane concentrations SiH4/CH4 (0.0 – 0.9%) explored. A further PL enhancement can be achieved by increase in the substrate temperature. The applied in situ doping from gas phase is shown to be an easy and effective method to incorporate Si in diamond in a controllable way.

Keywords: Diamond film, microwave plasma CVD, aluminum nitride, doping, silane, silicon-vacancy color center, photoluminescence, Raman spectroscopy.

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Authors Reviewers
Awadesh Kumar Mallik
K. Nishimura
Radhaballabh Bhar
Sandip Bysakh
Snigdha Roy
Vamsi Krishna Balla
Y. Hisamatsu
Y. Taga
A.P. Monteiro Baptista
Abdel Salam Hamdy Makhlouf
Chao Zhang
Ertan Arda
Francisco Jos_æGomes da Silva
Matem Erdogan
S. M. Masoudpanah
S. Naseem Shah
Satpal Sharma
Shihong Zhang
Tingkai Zhao
Tomasz Liskiewicz
Victor Fernando Santos Neto

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Authors Reviewers
Ali Ghaseminezhad Koushali
Denise Machado
Gauri P. Deshmukh
Gonzalo Otero-Irurueta
M. Nazari
Maria J. Hortigüela
Masoud Roudneshin
Paula A.A.P. Marques
Prakash A. Mahanwar
Ricardo Silva
Rui F. Silva
Victor Neto
Agnieszka Twardowska
Ahmad Salar Elahi
Alan Taylor
Alina Vladescu
Andrea Picone
Bahereh Marouf
Daniel Munteanu
Dnyaneshwar S. Patil
E. Ranjith Kumar
Elena Torskaya
Erwan Rauwel
Faai Zhang
Farid Harraz
Fominski Vyacheslav Yu
Gianlorenzo Bussetti
Guoliang Hou
I.V. Ryzhkov
Jean-Franois Pierson
Jia-Hong Huang
Jiaqi Zhu
Jiecai Han
Jiwen Zhao
Kelvii Wei Guo
Ng Eng-Poh
Nika Veronovski

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A. Rees
A.F. Shtan
A.I. Timoshenko
A.N. Shapoval
Andrey Bolshakov
Andrey P. Bolshakov
Awadesh K. Mallik
Bing Dai
C.A. Griffiths
Can Akaoğlu
Eugene E. Ashkinazi
G. Llewelyn
Guoyang Shu
H. Abd El-Wahab
Hisham R. Sadig
Hong-Ying Lin
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Jiecai Han
Jiwen Zhao
Kaili Yao
Kang Liu
Lei Yang
Li Cheng
O. V. Fonseca
Osama A. Fouad
Prakash A. Mahanwar
S. Ismat Shah
S.I. Solodovchenko
Salah A.A. Mohamed
Şaziye Uğur
Siddhi Shah
Snigdha Roy
V.G. Konovalov
V.S. Voitsenya
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Victor G. Ralchenko
Victor Ralchenko
Xiang Tengfei
Abhijit Majumdar
Ahmad Reza Rastkar
Alexander Vladimirovich Rogachev
B.C. Satishkumar
Carl Blais
Chang-Sik Ha
Chao Zhang
Chen-Kuei Chung
Cheng-Hsun Hsu
Guo Li-qiang
Hong-Ying Lin
Ido Zukerman
Juha Nikkola
Klara Hernadi
L. Skatkov
Martina Lindner
Nika Veronovski
Peter Zarras
Pierpaolo Carlone
Qi Hua Fan
R. Subasri
Satpal Sharma
Shihong Zhang
Tingkai Zhao
Tomasz Liskiewicz
Victor Fernando Santos Neto
Victor Ralchenko
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Weizhou Li
Yakovchuk K. Yu
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David K. Mills
Debasish Kuila
J. Kilgus
J. Miethlinger
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Kelvii Wei Guo
Lukasz Boron
M. Brandstetter
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Maria Richert
Marzanna Ksiazek
N. Bondar
P. Kalugasalam
Qi Chen
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S. Mahendra Selvan
S. Mohammadkhani
S.M. Deepa
T. Jayaprakash
Xiaohong Jiang
Alain Robin
Alexander Huber
Ashish Bandekar
Awadesh Kumar Mallik
David K. Mills
Ersnt Meyer
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George G. Chase
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Hans W.P. Koops
Hideya Kawasaki
Laurent Marot
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Michael D. Seymour
Nadja Felde
Philippe Mertens
Ryuichi Arakawa
Saheli Bera
Sergienko Gennady
Shicai Yang
Shihong Zhang
Sung-Hoon Kim
Tapan K. Rout
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Andreas Tünnermann
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Chintankumar J. Patel
D.L.S. Agostini
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Yue Lin
Yuki Kawaguchi
A. Lepschi
Awadesh Kumar Mallik
B.C. Satishkumar
Balhassn Ali
C.A. Griffiths
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Jiaqi Zhu
Josef Zemek
Juha Nikkola
Kelvii Wei Guo
Li Cheng
Lucian Baia
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A.K. Martyanov
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Avi Raveh
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C.K. Chung
C.R. Hsu
Cheng-Hsun Hsu
Cindy Webber
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L. Lyashok
L. Skatkov
M. Volosova
Matthew C. Davis
Meng-Ru Lin
N. Matsnev
N.S.Trofimov
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Nika Veronovski
O.N. Poklonskaya
Paul A. Goodman
Peter Zarras
Qi Hua Fan
R. Romanov
Raymond L. Boxman
S. Grigoriev
S.H. Wu
S.S. Savin
Sung-Hoon Kim
V. Fominski
V. Gomozov
V.G. Ralchenko
V.S. Sedov
Victor Neto
Wei-Che Huang
Y.C. Chung
A. Vicenzo
Alan Taylor
Camillo La Mesa
H.K. Kim
Hans Maier
Igor Vlasov
Igor Yurkevich
Irena Ban
Jindřich Musil
Josef Zemek
K. Du
Kai Chang Kou
Kevin J. Kovaleski
Lujun Pan
Manuel Evaristo
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Takahiro Maruyama
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Guo Li-qiang
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Hans Maier
Igor Vlasov
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Irena Ban
James L. Smialek
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Juha Nikkola
K. Du
Kai Chang Kou
Karen K. Gleason
Kevin J. Kovaleski
Klara Hernadi
Lujun Pan
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Mukul K. Dubey
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Qi Hua Fan
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Lucian Baia
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Shihong Zhang
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Victor Ralchenko
Virginia Danciu
Vladimir M. Aroutiounian
Weizhou Li
Yuliang He
Zengping Zhang

 

 

Ender


Dr. Amal Bouich, Postdoctoral Researcher.
 

This email address is being protected from spambots. You need JavaScript enabled to view it. Departament de Física Aplicada Institut de Disseny i Fabricació (IDF)

Física Aplicada a las Ingenierías Aeronáutica y Naval & Instituto de

Energia Solar. Universitat Politècnica de València. Universitat Politècnica de Madrid.

Spain.

Dr. Amal Bouich obtained the Ph.D. degree from the Universitat Politécnica de València with a Score: Cum Laude (10/10) and International Mention, carrying out her Ph.D. thesis in the field of semiconductor physics and their photovoltaic applications. In particular: the Investigation and Characterization of Hybrid Perovskites (MaPbI3, FaPbI3, CsPbI3) and Copper-Indium-Gallium selenide thin films for Tandem Solar Cells.

She started her research work at the Universitat Politécnica de Valencia (UPV) in 2018 . Since then, she has developed her research activity at the same university, holding her research work at the School of Design related to Applied Physics and Optoelectronics.

The research of doctor Bouich’s activity has been developed in the field of the Physics of Semiconductors, where she has published more than 34 papers in international journals and 30 oral Presentations at International Conferences. She got two excellent grants one is ‘Becas Iberoamérica Santander Investigación, Santander Universidades 2020-2021,’ and other is Ayudas a la movilidad, convocatoria “university junior international entrepreneurs” - V edición – 2019. She is the leader of the SpinOff project about tandem solar cells elaborated in IDF-UPV. She had a price from UPV ideas with the best-advanced idea project related to flexible perovskite solar cells. After getting her Ph.D., she got the award of best thesis project and Award of category the Best thesis at the EMRS -2021 Fall Meeting of the European Materials Research Society (E-MRS). Since 2018, she has integrated the research group named Group of Opto-electronics and Semiconductors (GOPS) and began research in the semiconductor laboratory at the UPV. Since then, Bouich has actively collaborated with the research group GOPS, specializing in the preparation and characterization of semiconductor thin films for optoelectronic and photovoltaic applications. Nowadays, Dr. Bouich gets her Postdoctoral position of Margaritas Salas at the University Polytechnic of Madrid with the collaboration of the University Polytechnic of Valencia; the main objectives are the realization of a new generation of solar cells based on new materials of perovskite stable, high efficiency with low-cost techniques and the consolidation of the Spin- Off to explode the know-how in this area.

Ender

Ahmed A. Farag is a Professor of Applied Physical Chemistry at Mansoura University, Egypt. He received the B.Sc., Master, and Ph.D. degrees in Chemistry from Science Faculty, Al-Azhar University/ Egypt in 2002, 2007, and 2011.

He has worked in National Research Center (NRC), Polymers and Pigments Department/Egypt until 2007. He is the Prof. of Applied Physical Chemistry at Egyptian Petroleum Research Institute (EPRI), Petroleum Applications Department, Egypt.

He has been named in the Top 2% Scientists Worldwide in a study from Stanford University in 2021. He got a postdoctoral scholarship in 2014 at the Materials Chemistry Department, Chemical Science and Engineering Faculty, Hokkaido University, Japan.

Scopus ID: 36131329500

ORCID ID: 0000-0002-9019-5635

 

Ender

Dr. Chen Li is an Associate Professor and a Master Supervisor of Aerospace Manufacturing Engineering at Harbin Institute of Technology, China. He was awarded the 10th Hiwin Doctoral Dissertation Award in 2020. He received his Bachelor degree in Process Equipment and Control Engineering from Northeastern University in 2015, China, and the PhD degree in Aerospace Manufacturing Engineering from Harbin Institute of Technology in 2019, China. From 2018 to 2019 he worked as a visiting scholar in The University of Queensland, Australia. His research interests focus on ultra-precision machining and micro/nano manufacture. His work was supported by National key R & D program, 973 program, National Natural Science Foundation, etc. He published more than 50 peer-reviewed scientific research papers, and the total citation number of these publications is more than 800. He is a member of Production Engineering Committee of Chinese Mechanical Engineering Society, Member of Heilongjiang Standardization Technical Committee for Instrument, Editorial board members of several academic journals and peer reviewers of more than 20 academic journals indexed by SCI, such as International Journal of Machine Tools & Manufacture, Journal of the European Ceramic Society, International Journal of Mechanical Sciences, Optics Express, Ceramics International, etc. He received the Outstanding Contribution Award at CCAT2017, Excellent Young Researcher Award at the CJUMP 2016, Excellent Paper Award at the CJUMP2015, Excellent Young Paper Award at the CCAT2017, etc.

Representative Publications:

[1] Li C, Li X, Wu Y, et al. Deformation mechanism and force modelling of the grinding of YAG single crystals. International Journal of Machine Tools and Manufacture, 2019, 143: 23-37.

[2] Li, C., Piao, Y., Meng, B., Hu, Y., Li, L., & Zhang, F. Phase transition and plastic deformation mechanisms induced by self-rotating grinding of GaN single crystals. International Journal of Machine Tools and Manufacture, 2022, 172: 103827.

[3] Li C, Zhang F, Meng B, et al. Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing. Materials & Design, 2017, 125: 180-188.

[4] Li C, Li X, Huang S, et al. Ultra-precision grinding of Gd3Ga5O12 crystals with graphene oxide coolant: Material deformation mechanism and performance evaluation. Journal of Manufacturing Processes, 2021, 61: 417–427.

[5] Li C, Wu Y, Li X, et al. Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals. Journal of Materials Processing Technology, 2020, 279(5): 116577.

[6] Li C, Zhang F, Wang X, et al. Repeated nanoscratch and double nanoscratch tests of Lu2O3 transparent ceramics: Material removal and deformation mechanism, and theoretical model of penetration depth. Journal of the European Ceramic Society, 2018, 38(2): 705-718.

[7] Li C, Zhang F, Meng B, et al. Material removal mechanism and grinding force modelling of ultrasonic vibration assisted grinding for SiC ceramics. Ceramics International, 2017, 43: 2981-2993.

[8] Li C, Piao Y, Meng B, et al. Anisotropy dependence of material removal and deformation mechanisms during nanoscratch of gallium nitride single crystals on (0001) plane. Applied Surface Science. 2022, 578: 152028.

[9] Y Zhang, Q Wang, C Li*, et al. Characterization of surface and subsurface defects induced by abrasive machining of optical crystals using grazing incidence X-ray diffraction and molecular dynamics. Journal of Advanced Research, 2022, 26, 51-61.

[10] Li C, Zhang F, Wu Y, et al. Influence of strain rate effect on material removal and deformation mechanism based on ductile nanoscratch tests of Lu2O3 single crystal. Ceramics International, 2018, 44(17): 21486-21498.

[11] Li C, Piao Y, Hu Y, et al. Modelling and experimental investigation of temperature field during fly-cutting of KDP crystals. International Journal of Mechanical Sciences, 2021, 210: 106751.

[12] Li C, Zhang Y, Zhou G, et al. Theoretical modelling of brittle-to-ductile transition load of KDP crystals on (001) plane during nanoindentation and nanoscratch tests. Journal of Materials Research and Technology, 2020, 9(6): 14142-14157.

[13] Li C, Zhang F, Piao Y. Strain-rate dependence of surface/subsurface deformation mechanisms during nanoscratching tests of GGG single crystal. Ceramics International, 2019, 45(12): 15015-15024.

[14] Li C, Zhang Q, Zhang Y, et al. Nanoindentation and nanoscratch tests of YAG single crystals: an investigation into mechanical properties, surface formation characteristic, and theoretical model of edge-breaking size. Ceramics International, 2020, 46(3): 3382-3393.

[15] Li, C., Hu, Y., Huang, S., Meng, B., Piao, Y., & Zhang, F. Theoretical model of warping deformation during self-rotating grinding of YAG wafers. Ceramics International. 2022, 48, 4637-4648.

[16] Li C, Zhang F, Ma Z, et al. Modeling and experiment of surface error for large-aperture aspheric SiC mirror based on residual height and wheel wear. International Journal of Advanced Manufacturing Technology, 2017, 91(1-4): 13-24.

[17] Li C, Zhang F, Ma Z. Study on grinding surface deformation and sub surface damage mechanism of RB-SiC ceramics. Proceedings of the Institution of Mechanical Engineers-Part B: Journal of Engineering Manufacture, 2018, 232: 1986-1995.

[18] Li C, Zhang F, Ding Y, et al. et al. Surface deformation and friction characteristic of nano scratch at ductile-removal regime for optical glass BK7. Applied Optics, 2016, 55: 6547-6553.

[19] Li C, Zhang F, Wang X, et al. Investigation on surface/subsurface deformation mechanism and mechanical properties of GGG single crystal induced by nanoindentation. Applied Optics, 2018, 57(14): 3661-3668.

[20] Li C, Zhang F, Meng B, et al. Simulation and experiment on surface morphology and mechanical properties response in nano-indentation of 6H-SiC. Journal of Materials Engineering and Performance, 2017, 26(3): 1000-1009.

[21] Dong G, Lang C, Li C*, et al. Formation mechanism and modelling of exit edge-chipping during ultrasonic vibration grinding of deep-small holes of microcrystalline-mica ceramics. Ceramics International. 2020, 46(8): 12458-12469.

[22] Rao X, Zhang F, Lu Y, Luo X*, Ding F, Li C*. Analysis of diamond wheel wear and surface integrity in laser-assisted grinding of RB-SiC ceramics. Ceramics International, 2019, 45(18): 24355-24364.

[23] Dong G, Wang L, Li C*, Yu Y. Investigation on ultrasonic elliptical vibration boring of deep holes with large depth-diameter ratio for high strength steel 18Cr2Ni4WA. International Journal of Advanced Manufacturing Technology. 2020, 108(5), 1527-1539.

[24] Zhang Y, Wu T, Li C*, et al. Investigation on path optimization and look-ahead speed control algorithm during numerical control grinding of dentures of glass ceramics. International Journal of Advanced Manufacturing Technology, 2021, 113, 1899-1913.

[25] Zhang F, Li C*, Zhao H, et al. Simulation and experiment of double grits interacting scratch for optical glass BK7. Journal of Wuhan University of Technology-Materials Science Edition. 2018, 33(1): 15-22.